Special Issue: 15 Years of SU8 as MEMS Material
نویسندگان
چکیده
منابع مشابه
Special Issue: 15 Years of SU8 as MEMS Material
In 1997, the first paper using SU-8 as a material for microfabrication was published [1], demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components. SU-8 quickly became a cheap alternative to X-ray LIGA, at least for applications that did not require the extreme aspect ratios and precision that can...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2015
ISSN: 2072-666X
DOI: 10.3390/mi6060790